DIFFUSE-SCATTERING OF HARD X-RAYS FROM ROUGH SURFACES

被引：87

作者：

WEBER, W ^{[1
]}

LENGELER, B ^{[1
]}

机构：

[1] FORSCHUNGSZENTRUM JULICH, FORSCHUNGSZENTRUM, INST SCHICHT & IONENTECH, W-5170 JULICH 1, GERMANY

来源：

PHYSICAL REVIEW B | 1992年 / 46卷 / 12期

关键词：

D O I：

10.1103/PhysRevB.46.7953

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The diffuse scattering of hard x rays from rough solid surfaces has been measured and described quantitatively in terms of an improved distorted-wave Born approximation. The rough surface is characterized by the rms roughness a, the height-height correlation length xi, and the roughness exponent h. The value for a is in excellent agreement with that deduced from reflectivity. The significance of the parameters sigma, xi, and h is tested by comparison with the results obtained from scanning force microscopy.

引用

页码：7953 / 7956

页数：4

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