CRYOGENICALLY COOLED MULTIPLE-SUBSTRATE HOLDER FOR HIGH-VACUUM

被引：1

作者：

CHAIKEN, A ^{[1
]}

HONEA, EC ^{[1
]}

RUPPRECHT, WS ^{[1
]}

TORRES, S ^{[1
]}

MICHEL, RP ^{[1
]}

机构：

[1] WS RUPPRECHT CONSULTING CO,FREMONT,CA 94539

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1994年 / 65卷 / 12期

关键词：

D O I：

10.1063/1.1145184

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A novel design is presented for a cryogenically cooled multisubstrate sample holder for thin film deposition in high vacuum. The cryogen flows through tubing soldered onto a fixed copper plate, while the substrates are mounted on a separate tray that is supported by a linear/rotary-motion feedthrough. By lowering the substrate tray into firm contact with the copper plate, substrate temperatures as low as 120 K can be achieved. © 1994 American Institute of Physics.

引用

页码：3870 / 3870

页数：1