MAGNESIUM AND ZINC ION-IMPLANTATION INTO SULFUR-DOPED GAP

被引:9
作者
INADA, T [1 ]
OHNUKI, Y [1 ]
机构
[1] HOSEI UNIV,COLL ENGN,KOGANEI,TOKYO,JAPAN
关键词
D O I
10.1063/1.1655451
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:228 / 230
页数:3
相关论文
共 8 条
[1]   VARIATION OF ELECTRICAL PROPERTIES WITH ZN CONCENTRATION IN GAP [J].
CASEY, HC ;
ERMANIS, F ;
WOLFSTIRN, KB .
JOURNAL OF APPLIED PHYSICS, 1969, 40 (07) :2945-+
[2]   ZINC ION-IMPLANTATION OF SULFUR-DOPED GAP [J].
HEMENGER, PM ;
DOBBS, BC .
APPLIED PHYSICS LETTERS, 1973, 23 (08) :462-464
[3]   MG AND BE ION IMPLANTED GAAS [J].
HUNSPERGER, RG ;
JAMBA, DM ;
WILSON, RG .
JOURNAL OF APPLIED PHYSICS, 1972, 43 (03) :1318-+
[4]   ANNEALING STUDY OF ION-IMPLANTED SILICON BY PHOTOELECTROMAGNETIC METHOD [J].
INADA, T ;
NISHIMURA, H ;
OHNUKI, Y .
APPLIED PHYSICS LETTERS, 1972, 21 (04) :137-+
[5]   TEMPERATURE DEPENDENCE OF RHS IN ALUMINUM-IMPLANTED LAYER IN N-TYPE SINGLE CRYSTAL SILICON [J].
ITOH, T ;
INADA, T ;
ISHIKI, M ;
MENABE, K .
APPLIED PHYSICS LETTERS, 1969, 14 (09) :255-&
[6]  
LADANY I, 1972, RCA REV, V33, P517
[7]   P-TYPE DOPANTS FOR GAP GREEN LIGHT EMITTING DIODES [J].
LORIMOR, OG ;
WEINER, ME .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (11) :1576-&
[8]  
van der Pauw L. J., 1958, PHILIPS RES REP, V1958, P1