DETERMINATION OF OPTICAL-CONSTANTS OF FILMS

被引：41

作者：

SZCZYRBOWSKI, J

CZAPLA, A

机构：

[1] Department of Solid State Physics, Institute of Metallurgy, Academy of Mining and Metallurgy, Cracow

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1979年 / 12卷 / 10期

关键词：

D O I：

10.1088/0022-3727/12/10/016

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A method is presented for determining the optical constants of films which have a slightly rough upper surface and which are somewhat optically inhomogeneous along the normal to the film surface. It is shown how the RMS height of surface irregularities, the value of introduced parameter a describing the optical and inhomogeneity and film thickness can be calculated on the basis of measured transmittance and reflectance in the region of interference fringes.

引用

页码：1737 / 1751

页数：15

共 8 条

[1] METHODE DE CALCUL DES CONSTANTES OPTIQUES DES COUCHES MINCES ABSORBANTES A PARTIR DE MESURES DE REFLEXION ET DE TRANSMISSION [J].