ADATOM MOBILITY ON VICINAL SURFACES DURING EPITAXIAL-GROWTH

被引:18
作者
LUSE, CN [1 ]
ZANGWILL, A [1 ]
VVEDENSKY, DD [1 ]
WILBY, MR [1 ]
机构
[1] UNIV LONDON IMPERIAL COLL SCI TECHNOL & MED,BLACKETT LAB,LONDON SW7 2BZ,ENGLAND
关键词
D O I
10.1016/0039-6028(92)90518-B
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We present a generalization of the Burton-Cabrera-Frank (BCF) model of step flow growth on a vicinal surface which takes exact account of island nucleation due to adatom interactions. Our basic result takes the form of a BCF-type equation where the adatom concentration is replaced by a quantity which involves the concentration of atoms in all possible bonding environments. Under conditions where islands larger than dimers can be neglected, we obtain a non-linear differential equation for the adatom concentration which has a simple analytic solution. In conjunction with Fick's law, the origin of reduced adatom mobility in the presence of island nucleation is demonstrated explicitly.
引用
收藏
页码:L535 / L540
页数:6
相关论文
共 17 条
[1]  
BETHGE H, 1990, KINETICS ORDERING GR, P125
[2]   THE GROWTH OF CRYSTALS AND THE EQUILIBRIUM STRUCTURE OF THEIR SURFACES [J].
BURTON, WK ;
CABRERA, N ;
FRANK, FC .
PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1951, 243 (866) :299-358
[3]   CLUSTER-SIZE DISTRIBUTION DURING EPITAXIAL-GROWTH FROM THE VAPOR ON STRONGLY MISORIENTED SURFACES [J].
FUENZALIDA, V .
PHYSICAL REVIEW B, 1991, 44 (19) :10835-10842
[4]  
FUENZALIDA V, 1985, 1ST P INT S SIL MOL, P86
[5]   THE KINETICS OF FAST STEPS ON CRYSTAL-SURFACES AND ITS APPLICATION TO THE MOLECULAR-BEAM EPITAXY OF SILICON [J].
GHEZ, R ;
IYER, SS .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1988, 32 (06) :804-818
[6]  
HILL TL, 1960, INTRO STATISTICAL TH
[7]  
KEIZER J, 1987, STATISTICAL THERMODY
[8]   ADATOM MIGRATION, CAPTURE AND DECAY AMONG COMPETING NUCLEI ON A SUBSTRATE [J].
LEWIS, B ;
REES, GJ .
PHILOSOPHICAL MAGAZINE, 1974, 29 (06) :1253-1280
[9]   GENERALIZED BURTON-CABRERA-FRANK THEORY FOR GROWTH AND EQUILIBRATION ON STEPPED SURFACES [J].
MYERSBEAGHTON, AK ;
VVEDENSKY, DD .
PHYSICAL REVIEW A, 1991, 44 (04) :2457-2468
[10]   NONLINEAR EQUATION FOR DIFFUSION AND ADATOM INTERACTIONS DURING EPITAXIAL-GROWTH ON VICINAL SURFACES [J].
MYERSBEAGHTON, AK ;
VVEDENSKY, DD .
PHYSICAL REVIEW B, 1990, 42 (09) :5544-5554