FABRICATION OF PIEZOELECTRIC THICK-FILM LOW-VOLTAGE MULTILAYER ACTUATORS USING A NEW DOUBLE-PASTE PRINTING TECHNIQUE

Thick-film technology is of increasing importance in the manufacture of solid-state sensors and actuators. However, fabrication of complicated component structures like actuators based on screen-printed thick-film multilayers (TFMLs) includes significant technical problems still to be solved. A novel double-paste screen-printing technology has been developed for the thick-film fabrication process of piezoelectric TFML actuators. It results in a remarkable improvement in the realization of components incorporating dozens of active piezolayers. New methods have been devised for various thick-film process main stages, including layout considerations, paste printing, active piezoceramic and electrode layer printing. Using previously developed thick-film piezoelectric pastes and commercial electrode paste, low driving voltage (< 40 V) multilayer piezoactuators have been realized. The actuator performance and piezoelectric constants are determined using an interferometric out-of-contact displacement measurement system developed for this purpose.