共 32 条
[1]
TOTAL (ELASTIC PLUS INELASTIC) CROSS-SECTIONS FOR ELECTRON-SCATTERING WITH CF4 AND GEH4 MOLECULES AT (10-DIVIDED-BY-5000) EV
[J].
EUROPHYSICS LETTERS,
1992, 17 (02)
:139-144
[2]
PLASMA SURFACE INTERACTIONS IN FLUOROCARBON ETCHING OF SILICON DIOXIDE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1991, 9 (03)
:1461-1470
[3]
CHRISTOPHOROU LG, 1984, ELECTRON MOL INTERAC, V2
[4]
CHRISTOPHOROU LG, 1984, ELECTRON MOL INTERAC, V1
[5]
Clementi E., 1974, Atomic Data and Nuclear Data Tables, V14, P177, DOI 10.1016/S0092-640X(74)80016-1
[6]
TOTAL-CROSS-SECTION MEASUREMENTS FOR POSITRON AND ELECTRON-SCATTERING BY O-2, CH4, AND SF6
[J].
PHYSICAL REVIEW A,
1988, 38 (03)
:1207-1216
[7]
TOTAL ELECTRON-IMPACT IONIZATION CROSS-SECTIONS OF FREE MOLECULAR RADICALS - A CASE OF FAILURE OF THE ADDITIVITY RULE
[J].
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES,
1989, 93 (02)
:259-264
[10]
HERZENBERG A, 1990, AIP C P, V204