COMBINATION ANALYSIS OF METAL-OXIDES USING ESCA, AES, AND SIMS

被引：36

作者：

CONNER, GR

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 02期

关键词：

D O I：

10.1116/1.569543

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：343 / 347

页数：5

共 17 条

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