THEORY OF RHEED AND APPLICATION TO SURFACE-STRUCTURE STUDIES

被引：13

作者：

ICHIMIYA, A

KOHMOTO, S

NAKAHARA, H

HORIO, Y

机构：

[1] Department of Applied Physics, School of Engineering, Nagoya University, Chikusa-ku, Nagoya

来源：

ULTRAMICROSCOPY | 1993年 / 48卷 / 04期

关键词：

D O I：

10.1016/0304-3991(93)90118-H

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

A dynamical theory of reflection high-energy electron diffraction (RHEED) by a multi-slice transfer matrix method is described briefly. According to the theory we give optimum thickness of slices and effects of higher-order Laue zones for the dynamical calculations. Examples of surface structural analyses for the Si(111)''1 x 1'' surface and structure during homoepitaxial growth on Si(111)7 x 7 surface are also described.

引用

页码：425 / 432

页数：8

共 22 条

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