GLOW-DISCHARGE PROCESSING VERSUS BAKEOUT FOR ALUMINUM STORAGE RING VACUUM CHAMBERS

被引:1
作者
DEAN, NR
HOYT, EW
PALRANG, MT
WALKER, BG
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 02期
关键词
D O I
10.1116/1.569506
中图分类号
O59 [应用物理学];
学科分类号
摘要
Experiments were carried out on laboratory and prototype scale systems in order to establish the feasibility of argon discharge processing the PEP storage ring aluminum vacuum chambers. Electron-induced desorption rates showed significant reductions following bakeout and/or argon glow discharge treatment ( greater than 10**1**9 ions cm** minus **1). Data are presented and discussed in relation to advantages and problems associated with: water removal, argon trapping and subsequent release, electron energy dependence, discharge distribution, and surface plasma chemical effects.
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页码:758 / 760
页数:3
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