OPTICAL-EMISSION SPECTROSCOPY OF PLASMA-ETCHING OF GAAS AND INP

被引：3

作者：

LAW, VJ

JONES, GAC

RITCHIE, DA

TEWORDT, M

机构：

[1] Cavendish Laboratory, University of Cambridge, Cambridge, CB3 OHE, Madingley Road

来源：

MICROELECTRONIC ENGINEERING | 1993年 / 21卷 / 1-4期

关键词：

Analysis - Beam plasma interactions - Emission spectroscopy - Integrated circuit manufacture - Ion beam lithography - Lithography - Microelectronic processing - Plasma interactions - Printed circuits - Semiconductor device manufacture;

D O I：

10.1016/0167-9317(93)90086-K

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes optical emission spectroscopy between 260 - 800 nm for ClCH3/H-2 rf-plasma reactive ion etching of Al0.3Ga0.7As, GaAs and InP compound semiconductors. The optical emission species identified for GaAs and InP etching are: Ga, GaCl, In, InCl and diatomic P2 (A1PI(g)-X1SIGMA(u)+) and P2+ (C2PI-X2PI) lines. Under the plasma condition used here and allowing for the stoichiometry of the etch species, it is found that the ratio of emission intensity is SIGMA(In/P) almost-equal-to 1.4. Taken together with the disparity between In and P2 vapour pressures, these results suggest that the initial rate of Indium desorption is a factor 1.4 greater than that of phosphorus, suggesting a near-surface P-enriched surface.

引用

页码：337 / 340

页数：4

共 7 条

[1]

Vodjdani, Parrens, Reactive ion etching of GaAs with high aspect ratios with Cl2–CH4–H2–Ar mixtures, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 5 B, (1987)

[2]

Van Roijen, Kemp, Bulle-lieuwma, ljzendoorm, Thijssen, J. Appl. Phys., 70, (1991)

[3]

Dulkin, Moshkalyov, Pyataev, Smirnov, Frolov, loffe, Proc. Int. Conf. ME91, 17, (1991)

[4]

Law, Jones, Semicond. Sci. Technol., 7, (1992)

[5]

Niggebrugge, Klug, G, Inst. Phys. Conf. GaAs and Related Compounds, 79, (1985)

[6]

Law, Jones, Ritchie, Tewordt, Inst. Phys. Conf: Technology and Applications of Ion Beams, (1992)

[7]

Harrison, Pearse, Gaydon, The Identification of Molecular Spectra, (1969)

← 1 →