MICROPROCESSOR-BASED AUTOMATIC HETERODYNE INTERFEROMETER

被引:8
作者
MOTTIER, FM
机构
关键词
D O I
10.1117/12.7972412
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
An interferometer is described which combines a number of principles known for a long time in a system of unusual versatility. The operation modes range from classical interferometry for visual or photographic evaluation of apertures up to 150 mm diameter, to programmed scan heterodyne interferometry with fringe counting and to time- and space-resolved subfringe measurement with better than 10 nm resolution. The instrument is primarily intended as a diagnostic tool in adaptive optics to monitor the deformable corrector mirror during operation.
引用
收藏
页码:464 / 468
页数:5
相关论文
共 2 条
  • [1] CRANE R, 1969, APPL OPTICS, V8, P538
  • [2] PALMA GE, 1977, C LASER ENGINEERING