MICROPROCESSOR-BASED AUTOMATIC HETERODYNE INTERFEROMETER

被引：8

作者：

MOTTIER, FM

机构：

来源：

OPTICAL ENGINEERING | 1979年 / 18卷 / 05期

关键词：

D O I：

10.1117/12.7972412

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An interferometer is described which combines a number of principles known for a long time in a system of unusual versatility. The operation modes range from classical interferometry for visual or photographic evaluation of apertures up to 150 mm diameter, to programmed scan heterodyne interferometry with fringe counting and to time- and space-resolved subfringe measurement with better than 10 nm resolution. The instrument is primarily intended as a diagnostic tool in adaptive optics to monitor the deformable corrector mirror during operation.

引用

页码：464 / 468

页数：5