ULTRASHARP TIPS FOR FIELD-EMISSION APPLICATIONS PREPARED BY THE VAPOR LIQUID SOLID GROWTH TECHNIQUE

被引：84

作者：

GIVARGIZOV, EI

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1993年 / 11卷 / 02期

关键词：

D O I：

10.1116/1.586882

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A technique for preparation of ultrasharp tips, preferentially of silicon, useful for field-emission research and applications is described. Regular arrays of tips, as well as triodelike microstructures (''Spindt cathodes''), can be prepared in such a way. In addition, high-aspect-ratio tips suitable for field-ion microscopy and field-electron microscopy can be prepared by this technique. Finally, a version of the technique allowing to prepare special-shape probes for scanning tunneling microscopes and related instruments is given.

引用

页码：449 / 453

页数：5

共 20 条

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