THE USE OF ICP TO DETERMINE DELIVERY RATES OF TRANSPORTABLE METAL CONTAMINANTS FROM METAL ORGANIC LIQUID SOURCES

被引：2

作者：

CONDIT, DA

GERSTUNG, CH

COWHER, ME

SHUSKUS, AJ

机构：

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1989年 / 18卷 / 05期

关键词：

D O I：

10.1007/BF02657472

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：593 / 598

页数：6

共 8 条

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[7] CONSIDERATION IN THE DESIGN OF A SAMPLE INTRODUCTION AND PLASMA GENERATION SYSTEM FOR ICP SPECTROSCOPY [J].

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