STRUCTURE AND CORROSION PROPERTIES OF AL/SI MULTILAYERS

被引：2

作者：

NAKAYAMA, T ^{[1
]}

KONNO, TJ ^{[1
]}

SATOH, H ^{[1
]}

SINCLAIR, R ^{[1
]}

机构：

[1] STANFORD UNIV,DEPT MAT SCI & ENGN,STANFORD,CA 94305

来源：

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 1993年 / 126卷 / 1-3期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1016/0304-8853(93)90572-J

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Al/Si multilayer films were synthesized by sputter deposition. Layer thicknesses were varied from 3 to 35 nm. The multilayers were composed of amorphous Si layers and (111) oriented crystalline Al layers. Corrosion properties in 0.1 M HCl varied with their modulation wavelength. With decreasing wavelength, the corrosion resistance remarkably increased.

引用

页码：167 / 169

页数：3