Structural and electrical characterization of PZT and PLZT films grown on spin-on processed conductive oxide electrodes

被引：9

作者：

Klee, M

Mackens, U

Hermann, W

Bathelt, E

机构：

[1] Philips GmbH Forschungslaboratorien, 52066 Aachen

来源：

INTEGRATED FERROELECTRICS | 1995年 / 11卷 / 1-4期

关键词：

D O I：

10.1080/10584589508013596

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A spin-on processing technique has been developed to grow conductive oxide electrodes e.g. RuOx as well as stacks composed of conductive oxide electrodes and PZT or PLZT on top of Si (100) substrates. The electrical properties of the PZT and PLZT thin films were characterized and compared with films grown on standard Ti/Pt electrodes.

引用

页码：247 / &

页数：14

共 13 条

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