DENSE CRYSTALLINE ZRO2 THIN-FILMS DEPOSITED BY PULSED-LASER EVAPORATION

被引：44

作者：

SANKUR, H

DENATALE, J

GUNNING, W

NELSON, JG

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 05期

关键词：

D O I：

10.1116/1.574257

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2869 / 2874

页数：6

共 18 条

[1] HGTE AND CDTE EPITAXIAL LAYERS AND HGTE-CDTE SUPERLATTICES GROWN BY LASER MOLECULAR-BEAM EPITAXY [J].

CHEUNG, JT ;

NIIZAWA, G ;

MOYLE, J ;

ONG, NP ;

PAINE, BM ;

VREELAND, T .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (04) :2086-2090

[2] PLASMA CREATION FROM THIN ALUMINUM TARGETS BY A TEA-CO2 LASER [J].

DICK, K ;

PEPIN, H ;

MARTINEAU, J ;

PARBHAKAR, K ;

THIBAUDEAU, A .

JOURNAL OF APPLIED PHYSICS, 1973, 44 (07) :3284-3293

[3]

Gaponov S. V., 1977, Soviet Physics - Solid State, V19, P1736

[4]

Gaponov S. V., 1982, Soviet Physics - Technical Physics, V27, P1127

[5]

GUENTHER KH, 1983, P SOC PHOTO-OPT INST, V401, P31, DOI 10.1117/12.935501

[6]

KROKHIN ON, 1972, LASER HDB, P1371

[7] LASER-INDUCED PLASMAS FOR PRIMARY ION DEPOSITION OF EPITAXIAL GE AND SI FILMS [J].

LUBBEN, D ;

BARNETT, SA ;

SUZUKI, K ;

GORBATKIN, S ;

GREENE, JE .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (04) :968-974

[8]

MACLEOD HA, 1982, P SOC PHOTO-OPT INST, V325, P21, DOI 10.1117/12.933282

[9]

MARTIN PJ, 1983, J MATER SCI, V21, P1

[10] PRODUCTION OF NEUTRAL ATOMS BY PULSED LASER-HEATING [J].

PRENGEL, AT ;

DEHAVEN, J ;

JOHNSON, EJ ;

DAVIDOVITS, P .

JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) :3551-3556

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