SOLID-STATE OXYGEN SENSOR USING SPUTTERED LAF3 FILM

被引:78
作者
MIURA, N
HISAMOTO, J
YAMAZOE, N
KUWATA, S
SALARDENNE, J
机构
[1] NIIHAMA NATL COLL TECHNOL,DEPT IND CHEM,NIIHAMA,EHIME 792,JAPAN
[2] UNIV BORDEAUX 1,ETUD MAT MICROELECTR LAB,F-33405 TALENCE,FRANCE
来源
SENSORS AND ACTUATORS | 1989年 / 16卷 / 04期
关键词
D O I
10.1016/0250-6874(89)85001-2
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
引用
收藏
页码:301 / 310
页数:10
相关论文
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