GAS-DETECTION IN THE PPB-RANGE WITH A HIGH-FREQUENCY, HIGH-SENSITIVITY SURFACE ACOUSTIC-WAVE DEVICE

被引：14

作者：

RAPP, M

STANZEL, R

VONSCHICKFUS, M

HUNKLINGER, S

FUCHS, H

SCHREPP, W

KELLER, H

FLEISCHMANN, B

机构：

[1] BASF AG,ZKL,W-6500 LUDWIGSHAFEN,GERMANY

[2] SIEMENS AG,W-8000 MUNICH 80,GERMANY

来源：

THIN SOLID FILMS | 1992年 / 210卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(92)90316-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We have developed a high sensitivity surface acoustic wave gas sensing device for NO2 with a detection limit in the ppb range. The sensor layers were phthalocyanines coated by sublimation, the Langmuir-Blodgett technique, and by chemical immobilization. Thicknesses ranged from one monolayer to 40 nm.

引用

页码：474 / 476

页数：3

共 9 条

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