INFLUENCE OF ELECTRODE CONTACTS ON LEAKAGE CURRENT OF SRTIO3 CAPACITORS

被引:11
作者
TAMURA, T
TAKAI, K
NOSHIRO, H
KIMURA, M
OTANI, S
YAMADA, M
机构
[1] Process Development Division, Fujitsu Ltd, Nakahara-ku, Kawasaki, 211
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1994年 / 33卷 / 12A期
关键词
SRTIO3; IV CHARACTERISTICS; ELECTRODE; BLOCKING CONTACT; OXYGEN VACANCY;
D O I
10.1143/JJAP.33.L1697
中图分类号
O59 [应用物理学];
学科分类号
摘要
The current-voltage (I-V) characteristics of capacitors using SrTiO3 film were investigated. Rectification characteristics were observed, either when oxygen gas was introduced during sputter deposition of top electrodes, or when the SrTiO3 film was annealed in oxygen. These I-V characteristics are attributed to blocking contacts between SrTiO3 and the electrodes. It is considered that such contacts are formed because of the reduction of the crystal defects in SrTiO3 films, and they have decisive influence on the leakage current of the capacitor.
引用
收藏
页码:L1697 / L1699
页数:3
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