INFLUENCE OF ELECTRODE CONTACTS ON LEAKAGE CURRENT OF SRTIO3 CAPACITORS

The current-voltage (I-V) characteristics of capacitors using SrTiO3 film were investigated. Rectification characteristics were observed, either when oxygen gas was introduced during sputter deposition of top electrodes, or when the SrTiO3 film was annealed in oxygen. These I-V characteristics are attributed to blocking contacts between SrTiO3 and the electrodes. It is considered that such contacts are formed because of the reduction of the crystal defects in SrTiO3 films, and they have decisive influence on the leakage current of the capacitor.