DEPENDENCE OF THE SURFACE-MORPHOLOGY OF COPPER COATED LASER FUSION-TARGETS ON THE DC SPUTTER SOURCE

被引：5

作者：

GOLDSTEIN, IS

VARON, J

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 03期

关键词：

D O I：

10.1116/1.570905

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1249 / 1252

页数：4

共 5 条

[1] RADIO-FREQUENCY MAGNETRON SPUTTERING OF THICK-FILM AMORPHOUS BERYLLIUM
BURT, RJ
MEYER, SF
HSIEH, EJ
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (01): : 407 - 410
[2] MAGNETRON SPUTTER COATING OF MICROSPHERICAL SUBSTRATES
LOWE, AT
HOSFORD, CD
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02): : 197 - 199
[3] SKUPSKY S, 1977, B AM PHYS SOC, V24, P945
[4] INFLUENCE OF APPARATUS GEOMETRY AND DEPOSITION CONDITIONS ON STRUCTURE AND TOPOGRAPHY OF THICK SPUTTERED COATINGS
THORNTON, JA
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (04): : 666 - 670
[5] VARON J, UNPUBLISHED