THE CHARACTERIZATION OF ULTRA-HARD CARBON-FILMS PRODUCED FROM PRE-PROCESSED CARBON POWDER IN A HYBRID PHYSICAL VAPOR-DEPOSITION SYSTEM

被引：6

作者：

TITHER, D

DEHBI, A

HOLIDAY, P

MATTHEWS, A

FITZGERALD, AG

HENDERSON, AE

STOREY, BE

DINES, TJ

JOHN, P

WILSON, JIB

机构：

[1] UNIV HULL,DEPT ENGN DESIGN & MANUFACTURE,HULL HU6 7RX,N HUMBERSIDE,ENGLAND

[2] UNIV DUNDEE,DEPT APPL PHYS & ELECTR & MFG ENGN,DUNDEE DD1 4HN,SCOTLAND

[3] UNIV DUNDEE,DEPT CHEM,DUNDEE DD1 4HN,SCOTLAND

[4] HERIOT WATT UNIV,DEPT CHEM,EDINBURGH EH14 4AS,MIDLOTHIAN,SCOTLAND

[5] HERIOT WATT UNIV,DEPT PHYS,EDINBURGH EH14 4AS,MIDLOTHIAN,SCOTLAND

来源：

CARBON | 1990年 / 28卷 / 05期

关键词：

Carbon films; characterization; hybrid physical vapor deposition;

D O I：

10.1016/0008-6223(90)90065-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The characteristics of carbon films deposited from a new carbon evaporation source material have been investigated. The source material is produced in the plasma chamber of a saddle field ion source and redeposited utilizing a hybrid deposition system under development. Extensive characterization of the structural, microstructural, optical, and mechanical properties of the carbon films are reported. Raman spectroscopy and optical evaluation of the films indicated that the carbon bonding was mainly graphitic with some sp3 bonding present. Hydrocarbon bonding is also detected. Microbeam and surface analysis studies also confirm these conclusions. The mechanical properties of the films were not consistent with a high density of sp3 bonding. © 1990.

引用

页码：641 / 655

页数：15

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