MECHANICS OF THE SILICA CAP DURING ZONE-MELTING OF SI FILMS

被引:7
作者
DUTARTRE, D
机构
关键词
D O I
10.1063/1.344441
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1388 / 1391
页数:4
相关论文
共 12 条
[1]  
BOSH MA, 1981, PHYS REV LETT, V47, P1151
[2]   INSITU OBSERVATION OF LAMP ZONE-MELTING OF SI FILMS ON PATTERNED SIO2 [J].
DUTARTRE, D .
APPLIED PHYSICS LETTERS, 1986, 48 (05) :350-352
[3]  
DUTARTRE D, 1988, MATER RES SOC S P, V107, P157
[4]   VISCOUS-FLOW OF THERMAL SIO2 [J].
EERNISSE, EP .
APPLIED PHYSICS LETTERS, 1977, 30 (06) :290-293
[5]   ZONE-MELTING RECRYSTALLIZATION OF SI FILMS WITH A MOVEABLE-STRIP-HEATER OVEN [J].
GEIS, MW ;
SMITH, HI ;
TSAUR, BY ;
FAN, JCC ;
SILVERSMITH, DJ ;
MOUNTAIN, RW .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (12) :2812-2818
[6]  
HAOND M, 1986, MRS P, V53, P59
[7]  
Kennedy J. C., 1964, PHYS CHEM GLASSES-B, V5, P130
[8]   VISCOELASTIC BEHAVIOR OF OXIDE-FILMS ON SILICON-CRYSTALS [J].
NISHINO, Y ;
IMURA, T .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1982, 74 (01) :193-200
[9]   THE SPREADING DYNAMICS OF A LIQUID-DROP ON A VISCOELASTIC SOLID [J].
SHANAHAN, MER .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1988, 21 (06) :981-985
[10]  
SOUTIF M, 1970, VIBRATIONS, P102