ACOUSTIC SURFACE WAVES ON SILICON

被引:39
作者
PRATT, RG
LIM, TC
机构
[1] Mullard Research Laboratories, Redhill, Surrey
[2] Department of Mathematics, Imperial College of Science and Technology, London
关键词
D O I
10.1063/1.1652878
中图分类号
O59 [应用物理学];
学科分类号
摘要
Acoustic surface wave phase velocities have been measured on (001), (110), and (111) surfaces of single-crystal silicon using the wedge method. Good agreement between the theoretical and experimental results was obtained. © 1969 The American Institute of Physics.
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页码:403 / &
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