ACOUSTIC SURFACE WAVES ON SILICON

被引：39

作者：

PRATT, RG

LIM, TC

机构：

[1] Mullard Research Laboratories, Redhill, Surrey

[2] Department of Mathematics, Imperial College of Science and Technology, London

来源：

APPLIED PHYSICS LETTERS | 1969年 / 15卷 / 12期

关键词：

D O I：

10.1063/1.1652878

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Acoustic surface wave phase velocities have been measured on (001), (110), and (111) surfaces of single-crystal silicon using the wedge method. Good agreement between the theoretical and experimental results was obtained. © 1969 The American Institute of Physics.

引用

页码：403 / &

共 6 条

[1] SURFACE ELASTIC WAVES IN SEMICONDUCTORS
GAZIS, DC
HERMAN, R
WALLIS, RF
[J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1960, 14 : 268 - 270
[2] CHARACTER OF PSEUDO SURFACE WAVES ON ANISOTROPIC CRYSTALS
LIM, TC
FARNELL, GW
[J]. JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 1969, 45 (04) : 845 - &
[3] SEARCH FOR FORBIDDEN DIRECTIONS OF ELASTIC SURFACE-WAVE PROPAGATION IN ANISOTROPIC CRYSTALS
LIM, TC
FARNELL, GW
[J]. JOURNAL OF APPLIED PHYSICS, 1968, 39 (09) : 4319 - +
[4] ULTRASONIC REFLECTIVITY AND SURFACE WAVE PHENOMENA ON SURFACES OF COPPER SINGLE CRYSTALS
ROLLINS, FR
LIM, TC
FARNELL, GW
[J]. APPLIED PHYSICS LETTERS, 1968, 12 (07) : 236 - &
[5] ELASTIC SURFACE WAVES IN A LAYERED SYSTEM OF CADMIUM SULFIDE ON GERMANIUM
SCHNITZLER, P
[J]. APPLIED PHYSICS LETTERS, 1967, 11 (09) : 273 - +
[6] VIKTOROV IA, 1967, RAYLEIGH LAMB WAVES, P8

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