ACTIVITY OF PLASMA ON INSULATING MATERIALS - CRITICAL TIME OF INTERACTION AND SYNERGISTIC EFFECTS

被引:5
作者
MAYOUX, C
机构
关键词
D O I
10.1109/94.326652
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The transformation and the degradation of insulating materials interacting with cold plasma discharges have certain common points. This is examined in the present review where the discharge activity is regarded from a physico-chemical point of view. A critical time of interaction seems to be observable in many studies, which defines the line between transformation and degradation. The role played by the plasma species like electrons or ions depends on the conditions of discharge initiation. The synergistic aspect of these species is also presented, and experimental modeling considered.
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页码:785 / 811
页数:27
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