PREPARATION AND CHARACTERIZATION OF REACTIVELY-SPUTTERED AMORPHOUS SI - H FILMS

被引:11
作者
IIZIMA, S
OKUSHI, H
MATSUDA, A
YAMASAKI, S
NAKAGAWA, K
MATSUMURA, M
TANAKA, K
机构
关键词
D O I
10.7567/JJAPS.19S1.521
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:521 / 526
页数:6
相关论文
共 14 条
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    MOUSTAKAS, TD
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    PAUL, W
    [J]. SOLID STATE COMMUNICATIONS, 1977, 23 (03) : 155 - 158
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