SOURCE AND BEHAVIOR OF SPURIOUS F+ SIGNALS IN ELECTRON-IMPACT ION SOURCES

被引：17

作者：

YATES, JT

KING, DA

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1972年 / 9卷 / 05期

关键词：

ION SOURCES;

D O I：

10.1116/1.1317023

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Communication to the Editor reports some observations of the transfer of fluorine-containing impurity species from one surface to another in ultrahigh vacuum. The work was done during other electron impact studies on a single crystal tungsten surface.

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页码：1256 / &

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