MICROLUMINESCENCE DEPTH PROFILES AND ANNEALING EFFECTS IN POROUS SILICON

被引:79
作者
PROKES, SM
FREITAS, JA
SEARSON, PC
机构
[1] SACHS FREEMAN ASSOCIATES INC,LANDOVER,MD 20785
[2] JOHNS HOPKINS UNIV,BALTIMORE,MD 21218
关键词
D O I
10.1063/1.106724
中图分类号
O59 [应用物理学];
学科分类号
摘要
Cross-sectional microluminescence measurements for 1-OMEGA-cm 70-mu-m porous silicon samples show a continuous decrease of the photoluminescence band as a function of sample depth. No spectral shift is observed. For samples annealed at 390-degrees-C, in addition to spectral intensity reduction, we observe the same redshift in all luminescence spectra independent of depth. A study of this luminescence redshift as a function of annealing temperature reveals a striking similarity to results observed for optical band gap shrinking of a-Si:H as a function of hydrogen loss during annealing.
引用
收藏
页码:3295 / 3297
页数:3
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