ION-BEAM STUDIES .4. USE OF MULTIPLY-CHARGED AND POLYATOMIC IONS IN AN IMPLANTATION ACCELERATOR

被引：26

作者：

FREEMAN, JH

CHIVERS, DJ

GARD, GA

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS | 1977年 / 143卷 / 01期

关键词：

D O I：

10.1016/0029-554X(77)90337-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：99 / 115

页数：17

共 19 条

[1] AITKEN D, 1970, P S ELECTRON ION BEA, P504
[2] HEAVY-ION SPUTTERING YIELDS OF GOLD - FURTHER EVIDENCE OF NONLINEAR EFFECTS
ANDERSEN, HH
BAY, HL
[J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (06) : 2416 - 2422
[3] BEANLAND DG, 1976, 25 ENGL I PHYS C ION, P262
[4] COBIC B, 1963, NUCL INSTRUM METHODS, V25, P157
[5] ION-BEAM STUDIES .1. RETARDATION OF ION-BEAMS TO VERY LOW ENERGIES IN AN IMPLANTATION ACCELERATOR
FREEMAN, JH
TEMPLE, W
BEANLAND, D
GARD, GA
[J]. NUCLEAR INSTRUMENTS & METHODS, 1976, 135 (01): : 1 - 11
[6] A NEW ION SOURCE FOR ELECTROMAGNETIC ISOTOPE SEPARATORS
FREEMAN, JH
[J]. NUCLEAR INSTRUMENTS & METHODS, 1963, 22 (02): : 306 - 316
[7] FREEMAN JH, 1970, R6330 AERE REP
[8] FREEMAN JH, 1970, P EUR C ION IMPLANTA
[9] FREEMAN JH, 1969, R6138 AERE HARW REP, P369
[10] FREEMAN JH, R6496 AERE HARW REP