A 5X5 MONOLITHIC INGAAS/INP MULTIPLE QUANTUM-WELL SPATIAL LIGHT-MODULATOR ARRAY

被引：2

作者：

HENSHALL, GD

GREENE, PD

BOURNE, WO

GUY, DRP

BESGROVE, DD

APSLEY, N

TAYLOR, LL

BASS, SJ

机构：

[1] STC Technol. Ltd., Harlow

来源：

SEMICONDUCTOR SCIENCE AND TECHNOLOGY | 1990年 / 5卷 / 06期

关键词：

D O I：

10.1088/0268-1242/5/6/008

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A 5*5 monolithic InGaAs-InP multiple quantum well two-dimensional spatial light modulator is reported for the first time. Silicon oxynitride passivation was employed to produce array pixels on a 400 mu m pitch. Spatially uniform modulation of 3.28 dB (2.15:1 contrast ratio) with an inter-pixel standard deviation of only +or-0.10 dB was obtained from eight active pixels at 1585 nm.

引用

页码：512 / 515

页数：4

共 10 条

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[10] Bass SJ, Barnett SJ, Brown GT, Chew NG, Cullis AG, Skolnick MS, Taylor LL, (1986)

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