VERTICAL ELEMENT REDISTRIBUTION IN NI78B11SI11 AMORPHOUS FILMS DEPOSITED ON SI AS REVEALED BY SCANNING AUGER MICROPROBE AND CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY

被引：1

作者：

SOBUE, S ^{[1
]}

OKUYAMA, F ^{[1
]}

机构：

[1] NAGOYA UNIV,DEPT SYST ENGN,APPL PHYS LAB,GOKISO CHO,SHOWA KU,NAGOYA,AICHI 466,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 07期

关键词：

D O I：

10.1063/1.342758

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2717 / 2722

页数：6

共 14 条

[1] ION INTERACTION WITH SOLIDS - SURFACE TEXTURING, SOME BULK EFFECTS, AND THEIR POSSIBLE APPLICATIONS [J].

AUCIELLO, O .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04) :841-867

[2] DIRECT MEASUREMENT BY SECONDARY-ION MASS-SPECTROMETRY OF SELF-DIFFUSION OF BORON IN FE40NI40B20 GLASS [J].

CAHN, RW ;

EVETTS, JE ;

PATTERSON, J ;

SOMEKH, RE ;

JACKSON, CK .

JOURNAL OF MATERIALS SCIENCE, 1980, 15 (03) :702-710

[3]

DOI M, 1984, PHYS STATUS SOLIDI A, V83, P529

[4] THE INFLUENCE OF COMPOSITION ON THE FORMATION AND STABILITY OF NI-SI-B METALLIC GLASSES [J].

DONALD, IW ;

DAVIES, HA .

JOURNAL OF MATERIALS SCIENCE, 1980, 15 (11) :2754-2760

[5]

FOLL F, 1981, J APPL PHYS, V52, P250, DOI 10.1063/1.328440

[6]

HOFFMANN S, 1984, PRACTICAL SURFACE AN, pCH4

[7] STRUCTURE AND THE PROCESS OF CRYSTALLIZATION IN THIN AMORPHOUS SB2S3 FILMS [J].

KAITO, C ;

NAKAMURA, N ;

YOSHIDA, T ;

SHIOJIRI, M .

JOURNAL OF CRYSTAL GROWTH, 1984, 66 (01) :156-162

[8]

Mathieu H., 1984, THIN FILM DEPTH PROF, P39

[9] GROWTH OF MOLYBDENUM CARBIDE PARTICLES FROM AN AMORPHOUS PHASE INDUCED BY ION-BOMBARDMENT [J].

OKUYAMA, F ;

FUJIMOTO, Y ;

KATO, S ;

KONDO, T .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1985, 38 (04) :275-279

[10] METALLOID REDISTRIBUTION IN NI75B15SI10 AMORPHOUS ALLOY OBSERVED BY SCANNING AUGER MICROPROBE [J].

OKUYAMA, F ;

FUMJIMORI, N ;

SOBUE, S ;

FUJIMOTO, S ;

FUJIMOTO, Y .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (07) :2618-2620

← 1 2 →