VARIATION OF THE OXYGEN CONTENT IN YBa2Cu3O7-x FILMS DEPOSITED BY HIGH OXYGEN PRESSURE DC-SPUTTERING

被引:9
作者
Faley, M. I. [1 ]
Poppe, U. [1 ]
Soltner, H. [1 ]
Daehne, U. [1 ]
Klein, N. [1 ]
Schulz, H. [1 ]
Evers, W. [1 ]
Urban, K. [1 ]
机构
[1] Forschungszentrum Julich, Inst Festkorperforsch, D-W5170 Julich, Germany
关键词
D O I
10.1109/77.233889
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have investigated the effect of the variation of the oxygen deficiency on T-c and the normal-state resistivity rho(T) of high quality (001) and (110) or (103) oriented epitaxial YBa2Cu3O7-x films deposited by the method of high oxygen pressure DC-sputtering. The oxygenation in a microwave oxygen plasma can increase Tc up to 95 K and completely restores the film properties suppressed by deoxygenation in molecular oxygen at the same pressure-temperature conditions. The second derivative of the normal-state resistivity d(2)p/dT(2) has a higher value for the nearly fully oxygenated films with better microstructure. A linear dependence p(T> 150K) was received for an oxygen deficiency "x" of about 0.1 or for nearly fully oxygenated films with a less perfect microstructure.
引用
收藏
页码:1082 / 1087
页数:6
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