FABRICATION OF A MAGNETIC TRANSDUCER COMPOSED OF A HIGH-DENSITY ARRAY OF MICROELECTROMAGNETS WITH ON-CHIP ELECTRONICS

被引：20

作者：

CARDOT, F

GOBET, J

BOGDANSKI, M

RUDOLF, F

机构：

[1] CSEM Swiss Center for Electronics, Microtechnology, Inc., CH-2007 Neuchâtel

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1994年 / 43卷 / 1-3期

关键词：

D O I：

10.1016/0924-4247(93)00652-K

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The realization of a new printing head involves the design and the batch fabrication of high-density arrays of microelectromagnets (1000 devices/cm2) which are sequentially addressed by on-chip integrated diode matrices. These smart magnetic actuators are achieved by a suitable combination of techniques belonging to standard silicon microelectronics, silicon microstructuring and electrochemical deposition. The magnetic fluxes generated by flat inductive coils located on the front face of a silicon substrate are concentrated by FeNi magnetic cores extending through the substrate thickness. The new technology has been successfully used for realizing high-performance magnetographic printing-beads producing a maximum induction of about 1.4 tesla.

引用

页码：11 / 16

页数：6