IMPROVED METHOD TO MEASURE THE THICKNESS OF THIN FILMS WITH A PHOTOELECTRIC ELLIPSOMETER

被引：44

作者：

ROTHEN, A

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1957年 / 28卷 / 04期

关键词：

D O I：

10.1063/1.1715860

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

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页码：283 / 285

页数：3

相关论文

共 4 条

[1] OPTICAL PROPERTIES OF SURFACE FILMS .2.
ROTHEN, A
HANSON, M
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1949, 20 (01) : 66 - 72
[2] OPTICAL MEASUREMENTS OF SURFACE FILMS .1.
ROTHEN, A
HANSON, M
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1948, 19 (12) : 839 - 841
[3] THE ELLIPSOMETER, AN APPARATUS TO MEASURE THICKNESSES OF THIN SURFACE FILMS
ROTHEN, A
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1945, 16 (02) : 26 - 30
[4] ROTHEN A, 1951, ANN NY ACAD SCI, V53, P1057