PREPARATION OF CO-N FILMS BY RF-SPUTTERING

被引：110

作者：

ODA, K ^{[1
]}

YOSHIO, T ^{[1
]}

ODA, K ^{[1
]}

机构：

[1] YONAGO NATL COLL TECHNOL,YONAGO 683,JAPAN

来源：

JOURNAL OF MATERIALS SCIENCE | 1987年 / 22卷 / 08期

关键词：

D O I：

10.1007/BF01086464

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：2729 / 2733

页数：5

共 17 条

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