PHYSICAL-MECHANISM OF THE REVERSE SHORT-CHANNEL EFFECT IN MOS-TRANSISTORS

被引:7
作者
HSU, ST [1 ]
KALISH, IH [1 ]
SUZUKI, K [1 ]
KAWABATA, R [1 ]
SHIBAYAMA, H [1 ]
机构
[1] SHARP CO LTD,INTEGRATED CIRCUIT GRP,TENRI,NARA 632,JAPAN
关键词
D O I
10.1016/0038-1101(91)90133-J
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The threshold voltage of short-channel-length MOS transistors may increase as the channel length of the device is decreased. This phenomenon is due to the existence of a potential barrier at the edge of the channel to the source/drain junction. This model was demonstrated experimentally with the drain current and the transconductance vs gate-voltage characteristics of short-channel length MOS transistors. It is shown that a potential barrier can strongly degrade the performance of MOS transistors.
引用
收藏
页码:605 / 608
页数:4
相关论文
共 6 条
[1]  
GROVE AS, 1967, PHYS TECHNOL S, P324
[2]   ANALYSIS OF THRESHOLD VOLTAGE FOR SHORT-CHANNEL IGFETS [J].
LEE, HS .
SOLID-STATE ELECTRONICS, 1973, 16 (12) :1407-1417
[3]   REVERSE SHORT-CHANNEL EFFECTS ON THRESHOLD VOLTAGE IN SUBMICROMETER SALICIDE DEVICES [J].
LU, CY ;
SUNG, JM .
IEEE ELECTRON DEVICE LETTERS, 1989, 10 (10) :446-448
[4]  
ORLOWSKI M, 1987, IEDM TECH DIG, P632
[5]  
SZE SM, 1981, PHYSICS SEMICONDUCTO, P262
[6]  
VANDERZEIL A, 1968, SOLID STATE PHYSICAL, P136