ALL METAL BAKEABLE PIEZOELECTRIC VALVE

An ultrahigh vacuum leak valve is described, which can be blaked up to 450-degrees-C. The throughput can be adjusted between 1x10(-10) and 5x10(-6) Pa M3 S-1 . The actuator is a piezoelectric stack which can be easily removed and set back. The baking temperature with the actuator in place is limited by the thermal specifications of the piezoelectric material. The inner surfaces, which are solely stainless-steel and gold, allow an almost unlimited choice of working gases.