EFFECTS OF DEPOSITION CONDITIONS ON THE SUPERCONDUCTING PROPERTIES OF RF AND DC MAGNETRON SPUTTER-DEPOSITED YBA2CU3O7-X FILMS

被引：12

作者：

LEE, WY ^{[1
]}

SALEM, J ^{[1
]}

LEE, V ^{[1
]}

RETTNER, CT ^{[1
]}

GORMAN, G ^{[1
]}

SAVOY, R ^{[1
]}

DELINE, V ^{[1
]}

HUANG, T ^{[1
]}

CHUNG, DW ^{[1
]}

机构：

[1] SAN JOSE STATE UNIV,SAN JOSE,CA 95192

来源：

THIN SOLID FILMS | 1988年 / 166卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(88)90379-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：181 / 189

页数：9

共 8 条

[1] CRYSTALLOGRAPHY AND MICROSTRUCTURE OF Y1BA2CU3O9-X, A PEROVSKITE-BASED SUPERCONDUCTING OXIDE [J].

BEYERS, R ;

LIM, G ;

ENGLER, EM ;

SAVOY, RJ ;

SHAW, TM ;

DINGER, TR ;

GALLAGHER, WJ ;

SANDSTROM, RL .

APPLIED PHYSICS LETTERS, 1987, 50 (26) :1918-1920

[2] HIGH-TC YBA2CU3O7-X THIN-FILMS ON SI SUBSTRATES BY DC MAGNETRON SPUTTERING FROM A STOICHIOMETRIC OXIDE TARGET [J].

LEE, WY ;

SALEM, J ;

LEE, V ;

HUANG, T ;

SAVOY, R ;

DELINE, V ;

DURAN, J .

APPLIED PHYSICS LETTERS, 1988, 52 (26) :2263-2265

[3]

LEE WY, 1988, AIP C P, V165, P95

[4]

MILLER DC, 1988, AIP C P, V165, P336

[5] THIN-FILMS OF Y-BA-CU-O ON SILICON AND SILICON DIOXIDE [J].

MOGROCAMPERO, A ;

TURNER, LG .

APPLIED PHYSICS LETTERS, 1988, 52 (14) :1185-1186

[6]

Rossanagel S.M., 1988, AM I PHYS C P, V165, P106

[7] PHOTOEMISSION ON HIGH-TC SUPERCONDUCTORS [J].

STEINER, P ;

COURTHS, R ;

KINSINGER, V ;

SANDER, I ;

SIEGWART, B ;

HUFNER, S ;

POLITIS, C .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1987, 44 (01) :75-79

[8] DEFECT STRUCTURE OF SUPERCONDUCTING YBA2CU3O7-DELTA [J].

VANTENDELOO, G ;

AMELINCKX, S .

JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE, 1988, 8 (03) :285-295

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