ALUMINUM FILM GROWTH BY CHEMICAL VAPOR-DEPOSITION OF AIH3(NME3)2

被引：51

作者：

WEE, ATS ^{[1
]}

MURRELL, AJ ^{[1
]}

SINGH, NK ^{[1
]}

OHARE, D ^{[1
]}

FOORD, JS ^{[1
]}

机构：

[1] UNIV OXFORD,INORGAN CHEM LAB,S PARKS RD,OXFORD OX1 3QR,ENGLAND

来源：

关键词：

D O I：

10.1039/c39900000011

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：11 / 13

页数：3

共 6 条

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FRASER, GW
STRAUGHAN, BP
GREENWOOD, NN
[J]. JOURNAL OF THE CHEMICAL SOCIETY, 1963, (JUL): : 3742 - &
[3] VIBRATIONAL SPECTRUM OF TRIMETHYLAMINE AND ITS DEUTEROMETHYL DERIVATIVES
GAYLES, JN
[J]. SPECTROCHIMICA ACTA PART A-MOLECULAR SPECTROSCOPY, 1967, A 23 (05): : 1521 - &
[4] LEE F, 1988, P MATER RES SOC BOST, V131, P339
[5] CHEMICAL BEAM EPITAXY
TSANG, WT
[J]. IEEE CIRCUITS AND DEVICES MAGAZINE, 1988, 4 (05): : 18 - 24
[6] WEE ATS, 1988, P MATER RES SOC BOST, V131, P351