ELECTRON-ENERGY DISTRIBUTION FUNCTION IN FLUCTUATING PLASMAS

被引：1

作者：

KIMURA, T

OHE, K

机构：

[1] Department of Systems Engineering, Nagoya Institute of Technology, Showa-ku Nagoya

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷 / 04期

关键词：

ELECTRON ENERGY DISTRIBUTION FUNCTION; IONIZATION WAVE; GLOW DISCHARGE; POSITIVE COLUMNS; LANGMUIR PROBE;

D O I：

10.1143/JJAP.30.848

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A method is proposed for detecting the electron energy distribution function (EEDF) of periodically fluctuating plasmas by averaging the time-resolved EEDF. The method is applied to detect the EEDF for externally excited and self-excited ionization waves in He positive columns of glow discharges. Good agreement is obtained between the EEDFs with and without the externally excited ionization wave.

引用

页码：848 / 853

页数：6

共 24 条

[1] CHARACTERISTICS OF THE ELECTRON-ENERGY DISTRIBUTION FUNCTION IN NITROGEN PLASMA [J].