OPTICALLY GUIDED LARGE-NANOSTRUCTURE PROBE

被引：4

作者：

MARCHMAN, HM

WETSEL, GC

机构：

[1] Eric Jonsson School of Engineering and Computer Science, University of Texas at Dallas, Richardson

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1993年 / 64卷 / 05期

关键词：

D O I：

10.1063/1.1144125

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A large-nanostructure probe with optically guided macroscopic scanning has been developed for high-resolution imaging and characterization of nanostructures. The novel optical viewing system allows placement of the imaging tip to within 1 mum of a desired site on the sample during coarse positioning. Fine positioning and imaging are accomplished with nanometer-scale resolution using a segmented-tube piezoelectric scanner. High-resolution images of identifiable quantum dots have been obtained to demonstrate the efficacy of the method.

引用

页码：1248 / 1252

页数：5

共 10 条

[1]

BERLINCOURT DA, 1964, PHYSICAL ACOUSTICS A, V61

[2]

BINNIG G, 1986, IBM J RES DEV, V30, P355

[3] SINGLE-TUBE 3-DIMENSIONAL SCANNER FOR SCANNING TUNNELING MICROSCOPY [J].