A SCANNING LOCAL PROBE PROFILOMETER AND REFLECTOMETER - APPLICATION TO OPTICAL CONTROL OF INTEGRATED-CIRCUITS

被引：10

作者：

SPAJER, M

BERGOSSI, O

GUIGNARD, M

机构：

[1] Laboratoire d'Optique P.M. Duffieux, Institut des Microtechniques de Franche-Comté, UA 214 CNRS

来源：

OPTICS COMMUNICATIONS | 1994年 / 106卷 / 4-6期

关键词：

D O I：

10.1016/0030-4018(94)90310-7

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A new scanning profilometer using a tapered fiber and a detection developed for near field microscopy is described. Results obtained with probes ended by a microlens or a conical tip are presented and compared to images given by classical microscopes.

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页码：139 / 145

页数：7

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