E--BEAM DEPOSITION OF ZRO2-SC2O3 FILMS

被引：10

作者：

QADRI, SB ^{[1
]}

SKELTON, EF ^{[1
]}

HARFORD, M ^{[1
]}

LUBITZ, P ^{[1
]}

APRIGLIANO, L ^{[1
]}

机构：

[1] DAVID TAYLOR RES CTR, ANNAPOLIS, MD 21402 USA

来源：

JOURNAL OF APPLIED PHYSICS | 1990年 / 67卷 / 05期

关键词：

D O I：

10.1063/1.345476

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A new method is presented of depositing zirconia-scandia films following evaporation of the oxide powders using an electron beam. The relative amount of Sc was increased in steps from 0 to 8 at. %. In the "as-deposited" state, all films were amorphous, but crystallized following post-deposition heat treatments. As the atomic percent of Sc was increased, the tetragonal phase of zirconia was stabilized. It appeared as a single phase for compositions with more than 5 at. % Sc.

引用

页码：2655 / 2657

页数：3

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