NONDESTRUCTIVE DEPTH PROFILE STUDY OF OXYGEN-EXPOSED LARGE-GRAIN SILVER USING ANGLE-RESOLVED AUGER-ELECTRON SPECTROSCOPY AND ION-SCATTERING SPECTROSCOPY

被引:25
作者
DAVIDSON, MR [1 ]
HOFLUND, GB [1 ]
OUTLAW, RA [1 ]
机构
[1] NASA,LANGLEY RES CTR,HAMPTON,VA 23665
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1991年 / 9卷 / 03期
关键词
D O I
10.1116/1.577624
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The adsorption of oxygen on polycrystalline Ag during exposure to 75 Torr of O2 for 1 h at temperatures ranging from 75 to 250-degrees-C has been examined using ion scattering spectroscopy (ISS) and angle-resolved Auger electron spectroscopy (ARAES). Quantification of these data provide the profile of the O concentration in the near-surface region of the Ag as a function of exposure temperature. The O concentration in the outermost atomic layer increases from 0% according to forward-scattered ISS for the cleaned surface to a maximum value of about 50 at.% for the 250-degrees-C exposure. A very small amount of subsurface O remains on the cleaned Ag surface after prolonged ion sputtering and annealing treatments. The total amount of subsurface O also increases monotonically with dosing temperature and reaches a uniform concentration level of 14 at.% over the region probed by Auger electron spectroscopy (AES). Exposures at higher temperatures (up to 600-degrees-C) results in the same near-surface O concentration profile as the 250-degrees-C exposure.
引用
收藏
页码:1344 / 1350
页数:7
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