TECHNIQUE FOR DETERMINING CONCENTRATION PROFILES OF BORON IMPURITIES IN SUBSTRATES

被引：116

作者：

ZIEGLER, JF

BAGLIN, JEE

COLE, GW

机构：

来源：

关键词：

D O I：

10.1063/1.1661816

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3809 / &

共 16 条

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