DEPOSITION OF IMPROVED OPTICALLY SELECTIVE CONDUCTIVE TIN OXIDE-FILMS BY SPRAY PYROLYSIS

被引:76
作者
MULLA, IS
SONI, HS
RAO, VJ
SINHA, APB
机构
[1] Natl Chemical Lab, Poona, India, Natl Chemical Lab, Poona, India
关键词
ANTIMONY COMPOUNDS - Applications - FILMS - Preparation - SEMICONDUCTING FILMS - Optical Properties - TIN COMPOUNDS - Pyrolysis;
D O I
10.1007/BF00553263
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Antimony-doped SnO//2 films were prepared by spray pyrolysis. Structural, electrical and optical properties were studied by varying the antimony concentration, film thickness and deposition temperature. About 94% average transmission in the visible region and about 87% infrared reflectance were obtained for antimony-doped SnO//2 films by a systematic optimization of the preparation parameters. As the best combination, an average transmission of 88% in the visible region and an infrared reflectance of 76% was possible for the doped SnO//2 films.
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页码:1280 / 1288
页数:9
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