OXIDATION OF THIN COPPER FILMS CONDENSED IN PRESENCE OF VARIOUS RESIDUAL GASES

被引：13

作者：

BROCKWAY, LO

ADLER, IM

机构：

来源：

关键词：

D O I：

10.1149/1.2404364

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：899 / &

共 19 条

[1]

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[2]

BLADES JD, 1960, ACR50 ONR S REPT, P121

[3]

BROCKWAY LO, 1967, FUNDAMENTALS GAS SUR, P147

[4] EFFECT OF RESIDUAL GASES ON PROPERTIES OF INDIUM FILMS [J].

CASWELL, HL .

CASWELL, HL .

[6]

DUSHMAN S, 1962, SCIENTIFIC FOUNDATIO, P572

[7] DISTORTION OF A CRYSTAL BY POINT IMPERFECTIONS [J].

ESHELBY, JD .

INO, S ;

OGAWA, S ;

WATANABE, D .

KANZAKI, H .

KANZAKI, H .