EELS QUANTIFICATION OF THE ELEMENTS SR TO W BY MEANS OF M45 EDGES

The quantification of electron energy-loss spectra requires the knowledge of partial scattering cross-sections. For M//4//5 edges these data are not well known. Therefore, we have determined a set of cross-section ratios (k-factors) of M//4//5 and oxygen K energy-loss edges for a number of elements between the atomic numbers 38 through 74 using thin film standards (oxide compounds). These cross-section ratios permit the quantification of EELS containing K, L//2//3 and M//4//5 edges, as demonstrated by some examples.