RADICAL BEAMS PRODUCED BY LASER-ABLATION AND THEIR APPLICATION

被引：6

作者：

NAKATA, Y

SASAKI, Y

OKADA, T

MAEDA, M

机构：

[1] Department of Electrical Engineering, Kyushu University, Hakozaki, Fukuoka

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 7B期

关键词：

LASER ABLATION; RADICAL BEAM; LASER-INDUCED FLUORESCENCE; REACTIVE CROSS SECTION; RADICAL-SURFACE INTERACTION;

D O I：

10.1143/JJAP.33.4316

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A variety of solid targets such as Al2O3, Si3N4, YBa2Cu3Ox and polymers were ablated with an ArF or KrF excimer laser. Laser-induced fluorescence spectroscopy (LIF) was used to detect species ejected from ablated targets and to characterize their kinetic properties. An aluminum radical beam produced from Al2O3 was applied to the measurement of the reactive cross section of Al with oxygen gas and to the study of the radical-surface interaction.

引用

收藏

页码：4316 / 4319

页数：4

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