A GAS-FLOW MODEL FOR THE SPUTTERING OF CONDENSED GASES

被引：123

作者：

URBASSEK, HM ^{[1
]}

MICHL, J ^{[1
]}

机构：

[1] UNIV UTAH,DEPT CHEM,SALT LAKE CITY,UT 84112

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 22卷 / 04期

关键词：

D O I：

10.1016/0168-583X(87)90146-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：480 / 490

页数：11

共 48 条

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